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--- old_photolith_recipes [2026/08/13 15:51] – gus
+++ old_photolith_recipes [2026/08/13 16:00] (current) – gus
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+=== S1813 Recipe comments ===
+May 2023:
+Development time for LOR: Baking LOR at 180C, 12 second exposure at 6 mJ/cm^2, and 100 seconds development gave a ~0.3 um undercut. - Dublin
+===SU-8 Photoresist===
+  * SU-8 is a polymer-like negative photoresist.
+  * We use SU-8 in liquid gated GFETs as a passivation layer to protect metal leads from the gate electrolyte.
+  * Read the SU-8 process guide for SU-8 2002 [[https://kayakuam.com/wp-content/uploads/2019/09/SU-82000DataSheet2000_5thru2015Ver4-2.pdf|here]].
+  * [[http://memscyclopedia.org/su8.html|This site]] has experimental information useful for trouble-shooting SU-8 processes.
 //(updated 04-08-2010)//