1. Anneal temperature = 100C
  2. Anneal time = 10 minutes
  3. Anneal gases (if alcohol growth is planned) = 0.45 SLM Hydrogen, 0.30 SLM Methanol, 0.15 SLM Ethanol, and 0.50 SLM Argon
  4. Anneal gases (if other recipe is planned) = growth gases and flow rates, and 0.5 SLM Argon
  5. Growth temperature = 0C
  6. Growth time = 0 minutes
  7. Growth gases = 0 and uncheck all gases (check “neither”)
  1. Anneal temperature = 800C
  2. Anneal time = 15 minutes
  3. Anneal gas = Atmosphere
  4. Growth temperature = 900C
  5. Growth time = 15 minutes
  6. Growth gases = 0.45 SLM Hydrogen, 0.30 SLM Methanol, and 0.15 SLM Ethanol
  1. Anneal temperature = 550C
  2. Anneal time = 5 minutes
  3. Anneal gas = Atmosphere
  4. Growth temperature = 825C
  5. Growth time = 60 miniutes
  6. Growth gases = 1.9 SLM Methane, 0.3 SLM Hydrogen

Growth Success Table

Catalyst Evaporated Stain Rinsed Stain Tape Photoresist Ink Jet Spin Coating Sputtered
CuCl2/PVP N
CuCl2 N N
FeMo Y,N N
Ferritin Y,Y N Y N
FeMo + alumina Y Y Y Y
Sputtered Iron Y