====== Eric Sundholm's Recipe ====== Eric is an EE grad student who TAs the EE class on chip making & has made hundreds of chips in the Owen clean room. His advice should be heeded. *Spin 1818 photoresist at 3000 rpm for 30 seconds (2 um layer) *Bake at 85C for 2 minutes *Expose for 6-8 seconds *Bake at 85C for 2 minutes (//skip this step for metal deposition//) *Develop 15-25 seconds in diluted 351 developer (4 DI water : 1 developer) (//Develop 8-10 seconds for metal deposition//) *Rinse quickly & 'like crazy' afterward (important) *Bake at 85C for 5 minutes (//skip this step for metal deposition//) *Eric says 5 minutes may be too long. Watch for cracks in the photoresist around the edges, cracks mean the bake is too long. ===== More Advice ===== *Apply metal deposition layer quickly after development. Don't wait longer than a few hours. *After rinsing with Acetone rinse with IPA & quickly blow it dry with N2 gas. This leaves less residue than rinsing with IPA & then DI water.