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--- photolithography [2023/05/23 11:45] – dublin
+++ photolithography [2024/03/19 14:27] (current) – dublin
@@ Line 58: / Line 58: @@
 May 2023:
-Development time for LOR: I found that using this recipe, but with 12 second exposure at 6 mJ/cm^2 and 100 seconds development gave a ~0.3 um undercut. - Dublin
+Development time for LOR: Baking LOR at 180C, 12 second exposure at 6 mJ/cm^2, and 100 seconds development gave a ~0.3 um undercut. - Dublin