Minot Lab Wiki

User Tools

Site Tools

Trace: • ebeam_filament
e-beam

Differences

This shows you the differences between two versions of the page.

Link to this comparison view

Both sides previous revisionPrevious revision
Next revision		Previous revision
e-beam [2021/01/25 15:24] – ethanminote-beam [2021/04/20 11:22] (current) – dublin
Line 2: Line 2:
  
 Standard operating procedure for the e-beam evaporator is printed out and attached to the machine.  Standard operating procedure for the e-beam evaporator is printed out and attached to the machine. 
 +
 +The e-gun filament may get old after 10 years. We wrote [[ebeam filament|instructions for changing the filament]]. 
  
 More information about crucibles is below. More information about crucibles is below.
 +
 +Important information on deposition of different materials (as well as which crucibles to use) is found on the [[https://www.lesker.com/newweb/menu_depositionmaterials.cfm?section=evapac&init=skip|Kurt J. Lesker site]].
  
 The evaporator chamber can also be used for vacuum anneals (see below) The evaporator chamber can also be used for vacuum anneals (see below)
Line 27: Line 31:
 [[https://www.lesker.com/newweb/deposition_materials/depositionmaterials_evaporationmaterials_1.cfm?pgid=ti1|Titanium]] - FABMATE [[https://www.lesker.com/newweb/deposition_materials/depositionmaterials_evaporationmaterials_1.cfm?pgid=ti1|Titanium]] - FABMATE
  
 +====Q-Pod Manual/Tooling Factor===
 +
 +[[https://products.inficon.com/getattachment.axd/?attaName=1b26fb75-a92c-4161-8fad-177f82144304|The Q-Pod manual can be found here.]] It contains the process for determining tooling factor:
 +
 +{{ebeam:determining_tooling_factor.png}}
 +
 +As well as densities and z-ratios for many different materials (p. 63 Table A-1)
  
-===Vacuum Anneal ===+====Vacuum Anneal ====
 A vacuum anneal will clean your chips of organics, leave you with better contact resistances (80-95% decreases), and can partially restore a leaky gate oxide. The process works with platinum and gold electrodes. Be aware: gold electrodes seem to have less adhesion to SiO2 following a vacuum anneal. This can be seen when contacting the electrodes in the probe station. Be aware: vacuum anneals sometimes create ~μm sized 'holes' in your electrodes. This effect is likely due to photo resist residue trapped under the electrodes. So far, the holes haven't affected device performance. A vacuum anneal will clean your chips of organics, leave you with better contact resistances (80-95% decreases), and can partially restore a leaky gate oxide. The process works with platinum and gold electrodes. Be aware: gold electrodes seem to have less adhesion to SiO2 following a vacuum anneal. This can be seen when contacting the electrodes in the probe station. Be aware: vacuum anneals sometimes create ~μm sized 'holes' in your electrodes. This effect is likely due to photo resist residue trapped under the electrodes. So far, the holes haven't affected device performance.
  
Line 54: Line 65:
     * Close the chamber and click //Shut down system//     * Close the chamber and click //Shut down system//
  
-===Substrate heater ===+====Substrate heater ====
 We've used a Q-series panel heater from [[http://www.solarproducts.com/|Solar Products, Inc]]. These are not actually substrate heaters, they are multi-purpose heaters used for drying paint & other applications. For that reason they are much cheaper (~$385) than 'real' substrate heaters (~$1,500). To make them vacuum compatible, request that they do not put in the fibrous insulating material in the back. According to [[http://eecs.oregonstate.edu/sites/default/files/facultystaff/tasker.jpg?1317070044|Chris Tasker]], they are good in vacuum up to ~900 C. We've used a Q-series panel heater from [[http://www.solarproducts.com/|Solar Products, Inc]]. These are not actually substrate heaters, they are multi-purpose heaters used for drying paint & other applications. For that reason they are much cheaper (~$385) than 'real' substrate heaters (~$1,500). To make them vacuum compatible, request that they do not put in the fibrous insulating material in the back. According to [[http://eecs.oregonstate.edu/sites/default/files/facultystaff/tasker.jpg?1317070044|Chris Tasker]], they are good in vacuum up to ~900 C.
  
e-beam.1611617091.txt.gz · Last modified: 2021/01/25 15:24 by ethanminot