Differences

This shows you the differences between two versions of the page.

--- e-beam [2019/09/09 20:44] – created ethanminot
+++ e-beam [2021/04/20 11:22] (current) – dublin
@@ Line 1: / Line 1: @@
-====== E-beam ======
+====== E-beam Evaporator ======
-We have one. Want to know how to use it?
+Standard operating procedure for the e-beam evaporator is printed out and attached to the machine.
-===Vacuum Anneal ===
+The e-gun filament may get old after 10 years. We wrote [[ebeam filament|instructions for changing the filament]].
+More information about crucibles is below.
+Important information on deposition of different materials (as well as which crucibles to use) is found on the [[https://www.lesker.com/newweb/menu_depositionmaterials.cfm?section=evapac&init=skip|Kurt J. Lesker site]].
+The evaporator chamber can also be used for vacuum anneals (see below)
+===Crucible Types for Common Materials===
+FABMATE crucibles can be used for any of the common materials. Sometimes there is a cheaper option available. Graphite and FABMATE crucibles are the same price.
+[[https://www.lesker.com/newweb/deposition_materials/depositionmaterials_evaporationmaterials_1.cfm?pgid=al1|Aluminum]] - FABMATE (P/N EVCFABEB-1)
+[[https://www.lesker.com/newweb/deposition_materials/depositionmaterials_evaporationmaterials_1.cfm?pgid=cr1|Chromium]] - FABMATE, graphite (P/N EVCEB-1), tungsten.
+[[https://www.lesker.com/newweb/deposition_materials/depositionmaterials_evaporationmaterials_1.cfm?pgid=fe1|Iron]] - FABMATE (Suggests using for one run only. Check for cracks before every run!)
+[[https://www.lesker.com/newweb/deposition_materials/depositionmaterials_evaporationmaterials_1.cfm?pgid=au1|Gold]] - FABMATE, molybdenum
+[[https://www.lesker.com/newweb/deposition_materials/depositionmaterials_evaporationmaterials_1.cfm?pgid=pt1|Platinum]] - FABMATE, graphite
+[[https://www.lesker.com/newweb/deposition_materials/depositionmaterials_evaporationmaterials_1.cfm?pgid=si2|Silicon Dioxide]] - FABMATE, graphite, tantalum
+[[https://www.lesker.com/newweb/deposition_materials/depositionmaterials_evaporationmaterials_1.cfm?pgid=ag1|Silver]] - FABMATE, molybdenum, tantalum, tungsten
+[[https://www.lesker.com/newweb/deposition_materials/depositionmaterials_evaporationmaterials_1.cfm?pgid=ti1|Titanium]] - FABMATE
+====Q-Pod Manual/Tooling Factor===
+[[https://products.inficon.com/getattachment.axd/?attaName=1b26fb75-a92c-4161-8fad-177f82144304|The Q-Pod manual can be found here.]] It contains the process for determining tooling factor:
+{{ebeam:determining_tooling_factor.png}}
+As well as densities and z-ratios for many different materials (p. 63 Table A-1)
+====Vacuum Anneal ====
 A vacuum anneal will clean your chips of organics, leave you with better contact resistances (80-95% decreases), and can partially restore a leaky gate oxide. The process works with platinum and gold electrodes. Be aware: gold electrodes seem to have less adhesion to SiO2 following a vacuum anneal. This can be seen when contacting the electrodes in the probe station. Be aware: vacuum anneals sometimes create ~μm sized 'holes' in your electrodes. This effect is likely due to photo resist residue trapped under the electrodes. So far, the holes haven't affected device performance.
@@ Line 29: / Line 65: @@
     * Close the chamber and click //Shut down system//
-===Substrate heater ===
+====Substrate heater ====
 We've used a Q-series panel heater from [[http://www.solarproducts.com/|Solar Products, Inc]]. These are not actually substrate heaters, they are multi-purpose heaters used for drying paint & other applications. For that reason they are much cheaper (~$385) than 'real' substrate heaters (~$1,500). To make them vacuum compatible, request that they do not put in the fibrous insulating material in the back. According to [[http://eecs.oregonstate.edu/sites/default/files/facultystaff/tasker.jpg?1317070044|Chris Tasker]], they are good in vacuum up to ~900 C.
@@ Line 36: / Line 72: @@
 It has two 1/4 - 20 stainless steel mounting studs on the back so that it can easily be fixed in place. There are two stainless steel terminals exiting the back of the heater and you would connect your leads to those terminals. The heater can be run either face up or face down.
-===Crucible Types for Common Materials===
-FABMATE crucibles can be used for any of the common materials. Sometimes there is a cheaper option available. Graphite and FABMATE crucibles are the same price.
-[[https://www.lesker.com/newweb/deposition_materials/depositionmaterials_evaporationmaterials_1.cfm?pgid=al1|Aluminum]] - FABMATE (P/N EVCFABEB-1)
-[[https://www.lesker.com/newweb/deposition_materials/depositionmaterials_evaporationmaterials_1.cfm?pgid=cr1|Chromium]] - FABMATE, graphite (P/N EVCEB-1), tungsten.
-[[https://www.lesker.com/newweb/deposition_materials/depositionmaterials_evaporationmaterials_1.cfm?pgid=fe1|Iron]] - FABMATE (Suggests using for one run only. Check for cracks before every run!)
-[[https://www.lesker.com/newweb/deposition_materials/depositionmaterials_evaporationmaterials_1.cfm?pgid=au1|Gold]] - FABMATE, molybdenum
-[[https://www.lesker.com/newweb/deposition_materials/depositionmaterials_evaporationmaterials_1.cfm?pgid=pt1|Platinum]] - FABMATE, graphite
-[[https://www.lesker.com/newweb/deposition_materials/depositionmaterials_evaporationmaterials_1.cfm?pgid=si2|Silicon Dioxide]] - FABMATE, graphite, tantalum
-[[https://www.lesker.com/newweb/deposition_materials/depositionmaterials_evaporationmaterials_1.cfm?pgid=ag1|Silver]] - FABMATE, molybdenum, tantalum, tungsten
-[[https://www.lesker.com/newweb/deposition_materials/depositionmaterials_evaporationmaterials_1.cfm?pgid=ti1|Titanium]] - FABMATE